Method for adjusting a head suspension parameter

ABSTRACT

A method for adjusting the static attitude of a head suspension by scanning a region of the head suspension with a laser. A head suspension having a gimbal region is provided that permits a head slider attached thereto to gimbal about pitch and roll axes in response to fluctuations in an air bearing over which the head slider flies. One or more predetermined regions of the head suspension are irradiated by a laser beam by scanning the laser beam across the head suspension regions to affect the static attitude of the head suspension. In a preferred embodiment, a plurality of parallel spaced apart lines are scanned on the leaf spring arms of a flexure with the laser to correct pitch errors in static attitude, and a plurality of parallel spaced apart lines are scanned with the laser in the cross section attached to the leaf spring arms to correct roll errors in static attitude. One or both sides of the head suspension can be scanned to create a desired pitch and/or roll correction. In addition, the predetermined scan regions can be scanned with a second plurality of lines to provide a precise static attitude adjustment.

TECHNICAL FIELD

The present invention relates generally to a method for adjusting aparameter of a head suspension through the application of heat to thehead suspension. In particular, the present invention is a method foradjusting the static attitude of a head suspension by scanning with alaser beam a plurality of lines in a desired region of the headsuspension.

BACKGROUND OF THE INVENTION

Head suspensions are well known and commonly used within dynamicmagnetic or optical information storage devices or drives with rigiddisks. The head suspension is a component within the disk drive thatpositions a magnetic or optical read/write head over a desired positionon the storage media where information is to be retrieved (read) ortransferred (written). Head suspensions for use in rigid disk drivestypically include a load beam that generates a spring force and thatsupports a flexure to which a head slider having a read/write head is tobe mounted. The load beam includes a mounting region at a proximal end,a rigid region at a distal end, and a spring region between the rigidregion and the mounting region for providing the spring force. Headsuspensions are normally combined with an actuator arm or E-block towhich the mounting region of the load beam is mounted with a base plateso as to position (by linear or rotary movement) the head suspension,and thus the head slider and read/write head, with respect to datatracks of the rigid disk.

The rigid disk within a disk drive rapidly spins about an axis, and thehead slider is aerodynamically designed to “fly” on an air bearinggenerated by the spinning disk. The spring force (often referred to asthe “gram load”) generated by the load beam urges the head slider in adirection opposing the force generated by the air bearing. The point atwhich these two forces are balanced during operation is the “fly height”of the head slider.

The flexure typically includes a slider bond pad to which a head slideris attached. The flexure attached to the load beam provides a resilientconnection between the slider and the load beam, and permits pitch androll motion of the head slider and read/write head as they move over thedata tracks of the disk in response to fluctuations in the air bearingcaused by fluctuations in the surface of the rigid disk. Head suspensionflexures can be provided in numerous ways, including designs in whichthe load beam and flexure are formed integrally with one another (atwo-piece design comprising the base plate and the integral loadbeam/flexure) and designs in which the flexure is a separate piece fromthe load beam (a three-piece design comprising the base plate, the loadbeam and the separate flexure). One three-piece design includes aflexure having a resilient tongue and two resilient spring arms. Thehead slider is supported on the resilient tongue (i.e. the slider bondpad), which is in turn supported between the spring arms. The springarms are connected to a flexure mounting region, which is in turnconnected to the load beam. The gram load provided by the spring regionof the load beam is transferred to the flexure via a dimple that extendsbetween the rigid region of the load beam and the flexure. The springarms allow the tongue of the flexure to gimbal in pitch and rolldirections to accommodate surface variations in the spinning magneticdisk over which the slider is flying. The roll axis about which the headslider gimbals is a central longitudinal axis of the head suspension.The pitch axis about which the head slider gimbals is perpendicular tothe roll axis. That is, the pitch axis is transverse to the longitudinalaxis of the load beam, and crosses the roll axis at or around the headslider.

In order to store and retrieve data from magnetic or optical disks onwhich data is densely packed, it is necessary for the head slider to flyclosely above the surface of the spinning data disk (on the order of 0.1μm) without colliding with the disk (“crashing”). Further, because ofthe dense packing of data on magnetic or optical disks, it is importantfor the read/write head attached to the head slider to be able to readfrom or write to a relatively small area or spot on the disk.

In relation to this, important performance characteristics of a headsuspension include the fly height at which the head suspension positionsa head slider and the positional orientation of the head slider inrelation to the spinning data disk when the head suspension is in a“loaded” state (i.e. under the influence of the balanced forces createdby the spring force and the air bearing). The head slider is designed tofly at a predetermined orientation, typically with its bottom surface ora portion thereof arranged generally parallel with the surface of thedisk, and this orientation is often referred to as the “dynamicattitude”.

When the head suspension is not actually flying over a spinning disk,the loaded state of the head suspension can be simulated by applying aforce in the same direction as the air bearing force at a point on thehead suspension other than to the slider bond pad where the head sliderwould be attached (or, if the slider is attached, other than to the headslider). This force is applied to lift the slider bond pad to its loadedposition at the fly height. The orientation or attitude of the sliderbond pad under this simulated loaded state is referred to as “staticattitude.” The difference or bias between the dynamic attitude and thestatic attitude can be measured for a given head suspension so that ameasurement of the static attitude, which can be an easier measurementto make than dynamic attitude, can be used to determine dynamic attitudefor a given head suspension. In other words, a head suspension typicallyhas a predetermined static attitude that can be used to assess thedynamic attitude of a head slider attached to the head suspension duringnormal operation of a disk drive.

Static attitude of a head slider bond pad can be measured with referenceto pitch and roll axes of the head suspension. Roll is a rotation of theslider bond pad about the roll axis of the head suspension and pitch isa rotation of the slider bond pad about the pitch axis of the headsuspension. Deviations from the desired static attitude about the rollaxis can be referred to as roll errors, while deviations from thedesired head slider attitude about the pitch axis can be referred to aspitch errors. Pitch and roll errors in static attitude can be caused bymanufacturing variations of the head suspension, handling of the headsuspension and related components during and after manufacturing, orcontamination of the head suspension by airborne foreign matter.

If pitch and/or roll errors exist in the static attitude of a headsuspension, there is a greater possibility that errors will exist in thedynamic attitude of the head slider, and that the head slider mightcrash into the disk. Such crashes are generally undesirable. Further,errors in static attitude of the head slider can cause the read/writehead to be out of proper orientation to the surface of the disk orfurther from the disk surface than it is designed to be. As such, theread/write head may not be able to “focus” on as small an area or spoton the disk as is necessary to efficiently transfer data to or from thedisk. This can degrade disk drive performance.

In addition, it may be desirable to adjust the static attitude of a headsuspension from a nominal orientation to impart a desired pitch and/orroll bias into the head suspension. In so far as these biases representincremental changes in pitch and roll static attitude imparted to thehead suspension, these too can be viewed as pitch and roll corrections,and the differences between nominal and desired attitude can again bereferred to as pitch and roll errors.

Because of the importance of correct head slider attitude, variousmethods exist for correcting pitch and roll errors to obtain appropriatestatic attitude. Such methods are disclosed in, for example, U.S. Pat.No. 5,682,780, issued Nov. 4, 1997 to Girard for “Gram Load, StaticAttitude And Radius Geometry Adjusting System For Magnetic HeadSuspensions”; U.S. Pat. No. 5,608,590, issued Mar. 4, 1997 for“Gimballing Flexure With Static Compensation And Load Point IntegralEtched Features”; and U.S. Pat. No. 5,729,889 issued Mar. 24, 1998 for“Method Of Mounting a Head Slider To a Head Suspension With StaticOffset Compensation”. Each of these applications and patents arecommonly owned by the assignee of the present application and are fullyincorporated herein by reference for all purposes.

One method of correcting errors in the static attitude involvesmechanically twisting and/or bending the head suspension to alter theprofile of the load beam. In such a method, the profile of the load beamcan be altered to support the flexure at an attitude to the disk surfacethat compensates for any errors in the static attitude of the headsuspension. That is, the load beam can be bent about an axisperpendicular to the longitudinal axis of the load beam to account forpitch errors in the static attitude of the head suspension. The loadbeam can also be twisted about its longitudinal axis to account for rollerrors in the static attitude. Similarly, the flexure can bemechanically bent and twisted to try to correct static attitude errors.

Adjusting the head suspension in this way, however, can negativelyaffect other head suspension parameters, such as the fly height, gramload, and overall resonance profile of the head suspension. Inparticular, bending the head suspension to affect pitch static attitudealso affects gram load, resonance, and head lift height, while twistingthe head suspension to correct roll static attitude affects headsuspension resonance and introduces vibratory motion in the off-trackdirection, which can negatively impact disk drive performance. Suchmechanical adjustments can also be undesirable due to the amount offorming required to get an appropriate adjustment in static attitude.Moreover, it can be difficult to properly mechanically deform headsuspension components due to their relatively small size, which limitsthe size and operating room for tools used to perform the mechanicaladjustments.

Further, it is known to form electrical leads on the load beam forcarrying electronic read/write signals from the read/write head to dataelectronics. It can be difficult to mechanically alter the profile ofthe head suspension without adversely affecting the electrical leads.Electrical leads can also make it difficult to engage tooling with thesuspension components to make a static attitude adjustment.

Mechanically adjusting head suspension static attitude can also beinefficient in terms of the precision with which static attitude can becorrected, and in the cycle time it takes to correct the static attitudeof an individual head suspension. It is a general industry trend to moredensely pack information onto a magnetic disk so as to be able to makedisk drives smaller without impacting the amount of data that can bestored in the drive. This necessitates smaller disk drive components,including smaller head suspensions. As data density increases and headsuspension size decreases, it becomes increasingly important that thehead slider be at the desired attitude when at the fly height, andacceptable tolerances on head suspension static attitude are reduced.Current methods for correcting deviations in static attitude thus maynot provide sufficiently fine corrections to account for decreasedstatic attitude tolerances. This can be particularly true when thestatic attitude correction occurs in individual components of the headsuspension prior to mounting them together, since additional errors maybe introduced in the mounting process.

Moreover, the conventional static attitude adjustment methods describedabove are typically performed along with head suspension load beamadjustments to gram load, and mixing the two adjustment processes cancreate longer feedback loops in the manufacturing process, whichincreases part cycle time. Mixing the two adjustment processes can alsolead to less accurate static attitude adjustments, which negativelyimpacts part yield.

There is a continuing need to develop more efficient methods forcorrecting pitch and/or roll errors in head suspension static attitude.A method that provides precise error corrections in a timely fashion,and that can be achieved without significant impact on other performancecriteria of the head suspension is highly desirable.

SUMMARY OF THE INVENTION

The present invention is intended to overcome the shortcomings ofconventional methods for adjusting performance characteristics of a headsuspension, such as the static attitude of the head suspension. In thisregard, the present invention provides a precision “micro-warping”technique for adjusting a head suspension parameter, such as pitch androll static attitude.

The micro-warping technique can provide sufficiently precise correctionsto meet increasingly tight performance requirements on static attitude.The present invention can also be performed at relatively fast cycletimes, and can provide corrections that have limited impact on otherperformance parameters of the head suspension.

The present invention is a method for adjusting a performance parameterof a head suspension, comprising the step of scanning a predeterminedregion of the head suspension with a laser beam. Scanning thepredetermined region of the head suspension with the laser beam impartsheat to the region in a controlled manner, and thus adjusts theperformance parameter of the head suspension. In a preferred embodiment,the static attitude of the head suspension is adjusted through thescanning of a first scan region located on the head suspension. The scanregion can be located on a first spring arm of a head suspensionflexure, and a second scan region can be located on a second spring armof the flexure. A plurality of lines can be scanned in the first andsecond scan regions, with the lines being adjacent to each other andparallel to the transverse axis of the head suspension. In such anembodiment, the lines extend across the entire width of the first andsecond spring arms, and each line causes a discrete amount ofmicro-warping in the scan region to introduce a pitch bias to the staticattitude. The first and second scan regions can be located on a topsurface of the flexure, on a bottom surface of the flexure, or on acombination of one scan region on the top surface and the other scanregion on the bottom surface.

In a second embodiment, a first scan region can be located on a crosspiece of a head suspension flexure. The first scan region is spacedapart from the longitudinal axis of the head suspension in a firstdirection, and a second scan region can be located on the cross piece ofthe flexure spaced apart from the longitudinal axis in a seconddirection opposite from the first direction. A plurality of lines can bescanned in each of the first and second scan regions, with the pluralityof lines being spaced apart from each other and parallel to thelongitudinal axis of the head suspension. The plurality of lines willcause the cross piece to warp in the scan region, which will twist theflexure and cause a roll bias in the static attitude of the headsuspension. In such an embodiment scan regions can also be located onthe spring arms of the flexure, with a plurality of lines scanned in thespring arm scan regions to effect a pitch bias in the static attitude.

Another embodiment of the present invention includes an iterative,closed loop process for providing precise adjustments to the staticattitude of a head suspension. In such an embodiment, a coarse staticattitude adjustment is performed by scanning a scan region of the headsuspension with a laser beam. The static attitude provided by the headsuspension after the coarse static attitude adjustment is performed isthen measured and a fine static attitude adjustment is performed byscanning the scan region a second time with the laser beam. In apreferred embodiment, the step of performing the coarse static attitudeadjustment includes determining pitch and roll errors between thedesired static attitude and the measured static attitude of the headsuspension, and determining the amount of scanning necessary to correctat least a portion of one of the pitch error and the roll error. Theamount of scanning can be controlled by controlling the number of scanlines that are scanned in the head suspension. The amount of scanning,e.g. the number of scan lines, necessary to correct at least a portionof the other of the pitch error and the roll error can also bedetermined. Determining the number of scan lines necessary to correctthe portion of the pitch and roll errors can be accomplished byreferencing stored coarse adjustment data describing the relationshipbetween angular deflection and the number of lines scanned in a headsuspension region. In one embodiment, the portion of the pitch error andthe roll error that are corrected by the coarse static attitudeadjustment is greater than about eighty percent of the total pitch errorand greater than about eighty percent of the total roll error betweenthe desired static attitude and the measured static attitude.

The fine static attitude adjustment can be performed in a similarfashion, wherein the remaining pitch error and roll error between thedesired static attitude and the static attitude provided by the headsuspension after the coarse static attitude adjustment are firstdetermined, and the amount of scanning necessary to compensate for oneof the remaining pitch error and the remaining roll error is predicted.The prediction can be made by consulting stored fine adjustment datadescribing the relationship between the angular deflection and thenumber of scan lines scanned in the scan region of the head suspension.In one embodiment of this invention, a response factor is calculatedafter the coarse static attitude adjustment. The response factorcomprises a ratio between the estimated angular deflection for thecoarse static attitude adjustment and the measured static attitudeadjustment. The number of scan lines for the fine static attitudeadjustment can be upwardly or downwardly adjusted based upon theresponse factor.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top planar view of a disk drive having a head suspensionassembly positioned over a magnetic disk.

FIG. 2 is an exploded view of the head suspension assembly of FIG. 1.

FIG. 3 is an isometric view of a portion of a head suspension flexureshowing a plurality of lines scanned in the spring arms of the flexurein accordance with the present invention to effect pitch corrections instatic attitude.

FIG. 4 is an isometric view of a portion of a flexure showing aplurality of lines scanned in the spring arms of the flexure to effectpitch corrections in static attitude and a plurality of lines scanned inthe cross piece of the flexure to effect roll corrections in staticattitude.

FIG. 5 is an isometric view of a portion of a flexure showing aplurality of lines scanned in the spring arms of the flexure to effectpitch and roll corrections in static attitude.

FIG. 6 a is a block diagram flow chart illustrating a closed loop,iterative process for providing a precise adjustment to static attitudein accordance with the present invention.

FIG. 6 b is a block diagram flow chart illustrating an additional stepin the closed loop, iterative process of FIG. 6 a.

FIG. 7 is a plot of a coarse adjustment to pitch static attitude showingangular deflection about a pitch axis as a function of the number oflines scanned on a bottom surface of a spring arm of a flexure.

FIG. 8 is a plot of a fine adjustment to pitch static attitude showingangular deflection about a pitch axis as a function of the number oflines scanned in the bottom surface of a spring arm after a coarseadjustment has already been made to the spring arm.

FIG. 9 is a plot of a coarse adjustment to pitch static attitude showingangular deflection about a pitch axis as a function of the number oflines scanned on a top surface of a spring arm of a flexure.

FIG. 10 is a plot of a fine adjustment to pitch static attitude showingangular deflection about a pitch axis as a function of the number oflines scanned in the top surface of a spring arm after a coarseadjustment to the spring arm has been made.

FIG. 11 is a plot of a coarse adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned in a bottom right surface of a flexure cross piece.

FIG. 12 is a plot of a fine adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned in a bottom right surface of a flexure cross piece after acoarse adjustment has been made to the flexure cross piece.

FIG. 13 is a plot of a coarse adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned on a bottom left surface of a flexure cross piece.

FIG. 14 is a plot of a fine adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned the bottom left surface of a flexure cross piece after acoarse adjustment has been made to the flexure cross piece.

FIG. 15 is a plot of a coarse adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned in a top surface of a spring arm of a flexure.

FIG. 16 is a plot of a fine adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned in a top surface of a flexure spring arm after a coarseadjustment to the flexure spring arm has been made.

FIG. 17 is a plot of a coarse adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned in a bottom surface of a flexure spring arm.

FIG. 18 is a plot of a fine adjustment to roll static attitude showingangular deflection about a roll axis as a function of the number oflines scanned in the bottom surface of a flexure spring arm after acoarse adjustment has been made to the spring arm.

FIG. 19 is a planar view of a portion of a flexure showing oneconfiguration of a trace assembly on the flexure useful in the presentinvention.

FIG. 20 is a planar view of a portion of a flexure showing analternative trace assembly on the flexure useful in accordance with thepresent invention.

FIG. 21 is a planar view of a portion of a flexure showing analternative trace assembly on the flexure useful in accordance with thepresent invention.

FIG. 22 is a planar view of a portion of a two piece head suspensionhaving a load beam and an integral flexure showing a plurality of linesscanned in the integral flexure in accordance with the presentinvention.

FIG. 23 is an isometric view of an apparatus for measuring staticattitude and scanning a plurality of lines in a head suspension with alaser beam to affect the static attitude of the head suspension inaccordance with the present invention.

DETAILED DESCRIPTION OF THE INVENTION

With reference now to the Figures, a disk drive 2 having a headsuspension 10 suspended over a disk 4 is shown in FIG. 1. Headsuspension 10 supports a head slider 22 at its distal end over the disk4. Head suspension 10 is attached at its proximal end to an actuator arm8, which is coupled to an actuator motor 6 mounted within disk drive 2.Actuator motor 6 is used to position the actuator arm 8, head suspension10, and slider 22 over a desired position on the disk 4. In theembodiment shown, actuator motor 6 is rotary in nature, and operates toradially position the head suspension 10 and slider 22 over disk 4.Other actuator motors, such as a linear actuator motor, can of course beused.

In use, head slider 22 reads and/or writes data to and from disk 4 indisk drive 2, and the head suspension 10 supports and aligns the headslider 22 over a desired location on disk 4 in response to signalsreceived from a microprocessor (not shown). Disk 4 rapidly spins aboutan axis, and an air bearing is created by rotating disk 4. Head slider22 is aerodynamically designed to “fly” on the air bearing between thesurface of the disk 4 and the head slider 22. As head slider 22 fliesover the air bearing, it is urged away from the surface of the disk 4 bythe air bearing. Head suspension 10 provides a gram load spring forcethat counteracts the force of the air bearing and urges the head slider22 toward the surface of the disk 4. The point at which these two forcesare balanced during operation is known as the “fly height” of the headslider. The specific positional orientation of head slider 22 providedby head suspension 10 at the fly height in relation to the surface ofthe disk 4 is commonly referred to as the “dynamic attitude” of the headslider 22.

As shown in greater detail in FIG. 2, head suspension 10 is comprised ofa plurality of separate components that are mounted together. Headsuspension 10 includes a load beam 12 to which a flexure 40 is mounted.Load beam 12 includes a mounting region 13 at the proximal end of theload beam 12, to which a base plate 14 is mounted. Mounting region 13and base plate 14 are mounted to the actuator arm 8 of disk drive 2 in aknown manner. Load beam 12 further includes a rigid region 24 at thedistal portion of the load beam 12, and a spring region 20 locatedproximal of the rigid region 24 and distal of the mounting region 13.Flexure 40 (discussed more filly below) is mounted to the rigid region24 of load beam 12, and provides a resilient connection between the loadbeam 12 and head slider 22.

Spring region 20 of load beam 12 provides a desired gram load thatopposes the force exerted upon head slider 22 by the air bearinggenerated by rotating disk 4. Toward this end, spring region 20 caninclude a preformed bend or radius that provides a precise gram loadforce. The gram load is transmitted to flexure 40 through rigid region24 of load beam 12. A load point dimple 9 (shown in FIG. 3) that extendsbetween the rigid region 24 and the flexure 40 can be used to provide apoint of transfer for the gram load generated by spring region 20. Theload point dimple 9 also provides a point about which the head slider 22attached to flexure 40 can gimbal in response to fluctuations in the airbearing.

Flexure 40 provides a resilient connection between head slider 22 andload beam 12, and is designed to permit head slider 22 to gimbal inresponse to variations in the air bearing generated by rotating disk 4.That is, minute variations in the surface of disk 4 will createfluctuations in the air bearing generated by the rotating disk 4. Thesefluctuations in the air bearing will cause slider 22 to roll about alongitudinal axis 11 of head suspension 10, and to pitch about atransverse axis 15. Longitudinal axis 11 is defined to extend along thecenter line of head suspension 10 and through the load point 9, whiletransverse axis 15 is defined to be orthogonal to axis 11 and intersectaxis 11 at the load point between load beam 12 and flexure 40. Flexure40 is designed to permit the slider 22 to gimbal in both pitch and rolldirections in response to these air bearing variations. In theembodiment shown, flexure 40 is separately formed from load beam 12(i.e. head suspension 10 is a three-piece design comprising base plate14, load beam 12, and flexure 40), and includes a mounting region 42that overlaps and is mounted to the rigid region 24 of load beam 12using spot welds or other known techniques. Flexure 40 also includes agimbal region 44 that can extend beyond the distal end of load beam 12,and that provides the resilient compliances that permit slider 22 togimbal in pitch and roll directions. The gimbal region 44 is comprisedof a pair of longitudinally extending spring arms 30 that are connectedat the distal end of the arms 30 by a cross piece 28. The longitudinallyextending spring arms 30 and cross piece 28 define a gap between thespring arms into which a tongue or cantilever beam 26 proximally extendsfrom cross piece 28. Cantilever beam 26 includes a slider mountingsurface 27 to which slider 22 is mounted using known methods such asadhesive. The cantilever beam 26 and spring arms 30 are sufficientlyresilient to pitch about axis 15 and to torsionally rotate about axis 11to permit pitch and roll motion of slider 22 as needed during operationof disk drive 2.

In the embodiment shown, flexure 40 also includes a trace assembly 50(shown in exploded view in FIG. 2) that provides electricalinterconnection between slider 22 and a microprocessor (not shown) ofdisk drive 2 to convey read and write signals to and from head slider22. The trace assembly 50 of the shown embodiment is comprised of aconductive layer of material 52 formed into longitudinal traces thatextend along the length of flexure 40, and an insulating layer ofmaterial 54 interposed between flexure 40 and the conductive layer 52.As is described in commonly assigned U.S. Pat. No. 5,844,751, the entiredisclosure of which is hereby incorporated by reference for allpurposes, the flexure 40 and trace assembly 50 can be formed integrallywith each other from a multi-layer laminate sheet of material throughthe use of plasma etching and other known methods. A trace assembly canalternatively be formed separately from a flexure and mounted to theflexure in a known method, such as through the use of adhesive. Theinsulating layer of material of a trace assembly can also be depositedonto the flexure in a desired pattern, with the conductive layer ofmaterial of the trace assembly being deposited onto the insulating layerof material. Trace assembly 50 can be routed across the flexure in anynumber of desired patterns as dictated by a specific application. In theembodiment shown in FIG. 2, the trace assembly 50 at gimbal region 44 offlexure 40 is adjacent and spaced apart from the spring arms 30 of theflexure 40.

As described above in the Background section, during normal operation ofdisk drive 2, head slider 22 assumes an orientation over the surface ofrotating disk 4 (the dynamic attitude) at a specific separation from thesurface of the disk 4 (the fly height). As technology progresses, datatracks on disk 4 are being more closely spaced together on the surfaceof the disk to increase its storage capacity. In order to accuratelywrite information to these data tracks and read information from thesedata tracks, it is necessary for head slider 22 fly closely above thesurface of the spinning disk 4, and fly heights on the order of 0.1micrometers are common. Given this close spacing between slider 22 anddisk 4, and further in view of the dense packaging of data on the disk4, it is also important that head slider 22 be properly aligned abovedisk 4 when at the fly height in order to read data from or write datato a relatively small area or spot on disk 4.

In this regard, one important performance criteria of a head suspension10 is that it position head slider 22 at the desired orientation duringnormal operation of disk drive 2. In a typical operation, it is desiredthat the head slider 22 have a dynamic attitude that is generallyparallel to the surface of disk 4 when the head slider is at the flyheight, although other orientations that incline the head sliderrelative to a planar surface of disk 4 are contemplated. As describedabove in the Background section, the dynamic attitude of head slider 22can be determined in terms of the static attitude of the head suspension10. The static attitude of head slider 10 can be measured with referenceto pitch axis 15 and roll axis 11 of head suspension 10, and anydifferences between a desired static attitude and the actual staticattitude of head suspension 10 (whether those differences deviationsfrom a nominal orientation or are desired pitch and roll biases to beintroduced into the head suspension static attitude) can becharacterized in terms of pitch errors and roll errors. Deviations fromthe desired static attitude measured about the transverse axis 15 ofhead suspension 10 are referred to as pitch errors, while deviationsfrom the desired static attitude measured about longitudinal axis 11 arereferred to as roll errors.

In order to assess the magnitude of any pitch and/or roll errors in thestatic attitude of head suspension 10, static attitude is typicallymeasured, and pitch and roll errors in the static attitude assessed,prior to the head slider being mounted to the head suspension and priorto the head suspension being mounted in a disk drive. An apparatus 70useful in this regard is shown in FIG. 23 (described in more detailbelow). In a typical measurement operation, either the head suspension10 or a specific component of the head suspension 10 (such as flexure40) is placed in a “loaded” state by clamping mechanism 72 to simulatethe fly height of a head slider, and the orientation of a slider bondpad to which a head slider can be later attached is measured by probe74. Errors in the pitch and roll direction are then assessed. It is alsocontemplated that static attitude can be assessed after a head slider isattached to a head suspension in a similar manner. In either event, oncepitch and roll errors for the static attitude of a head suspension areknown, it is desirable to correct the pitch and roll errors if they aregreater than a predetermined tolerance in order to increase the yield ofuseful parts from the head suspension manufacturing process.

FIGS. 3-5 illustrate embodiments of a head suspension component, each ofwhich is processed to correct errors in the static attitude of headsuspension 10. A distal portion of flexure 40 that is attached to a headsuspension in the manner described above in connection with FIGS. 1 and2 is illustrated in FIG. 3. One or more specific regions of the flexure40 are scanned with a laser by traversing the laser across the specificregions of the flexure to plastically deform the flexure 40, and thuseffect a pitch and/or roll bias in the flexure 40, which will in turnaffect the static attitude of head suspension 10 and the dynamicattitude of a head slider (not shown) attached to the flexure 40.

In a preferred embodiment, a continuous wave, focused laser beamtraverses and irradiates the flexure 40 to impart heat energy to theflexure and to provide precise micro-warping of that portion of theflexure irradiated. In the region scanned by the laser, an elevatedtemperature isothermal is created on the irradiated surface along thepath that the laser traverses on flexure 40. The heated materialexpands, but is constrained by the cooler material surrounding thescanned area. In this manner, the scanned region undergoes compressiveplastic strain, and upon cooling, will curl towards the laser beam.Through the selective scanning of regions of the flexure 40, the flexure40 can be caused to warp in a predetermined and desired manner, whichwill in turn provide a desired pitch and/or roll bias to the flexure 40,and thus correct pitch and roll errors in the static attitude of flexure40 and head suspension 10.

Toward this end, at least one scan region 32, and in the illustratedembodiment a plurality of scan regions 32, are located on flexure 40,which are irradiated with a laser. As shown in FIG. 3, a scan region 32is located in each of the spring arms 30 of flexure 40 (denoted as scanregion 32 a and scan region 32 b) near a distal end of each of thespring arms 30. A laser (shown in more detail in FIG. 23 and describedbelow) scans at least one of the scan regions 32 of flexure 40 bytraversing the scan region 32 in a desired pattern to irradiate the scanregion 32 and impart heat to the individual scan region 32.

More to the point, in the embodiment shown in FIG. 3, a laser traversesa plurality of adjacent paths across each of the scan regions 32 a and32 b, and thus scans a plurality of lines 34 in each of the scan regions32 a and 32 b. Lines 34 are scanned in a direction generally parallel tothe transverse axis 15, and lines 34 extend across the entire width ofeach arm 30. Lines 34 can be spaced apart from each other in a desiredmanner. Scanning regions 32 a and 32 b in this manner causes scanregions 32 a and 32 b to curl upward in a direction toward the surfaceof arms 30 that is scanned by the laser along each of the lines 34. Inthis manner, arms 30 are plastically deformed (i.e. warped) in adirection that is generally about transverse axis 15, and a pitch biasis introduced into each of the spring arms 30 at scan regions 32 a and32 b.

As shown in FIG. 3, flexure 40 includes a top surface 46 and a bottomsurface 48 opposite top surface 46, and a positive or negative warp atscan region 32 a and at scan region 32 b, and thus a positive ornegative bias in pitch static attitude, can be introduced to theindividual spring arms 30 of flexure 40 by selectively scanning eitherthe top surface 46 or the bottom surface 48 of the spring arms 30. Asshown, slider mounting surface 27 of flexure 40 (to which a head slideris attached) is positioned on the bottom surface 48 of flexure 40. Apositive pitch deflection is defined to be an induced warp in theflexure 40 about transverse axis Inconsistent with the right hand rule(i.e. that is toward the surface of a disk over which the flexure 40 ismounted). That is, lines 34 scanned on the bottom surface 48 of flexure40 will cause the scan regions 32 a and 32 b to curl in a directiontoward the surface of the disk, thus inducing a positive pitch bias inthe orientation provided by the flexure 40 to the head slider. Theamount of positive pitch bias introduced is tailored to correct anegative pitch error in static attitude. Alternatively, lines 34 scannedon a top surface 46 of flexure 40 will induce a warp in an opposite, ornegative, direction. This negative pitch bias can be tailored to correcta positive pitch error in static attitude.

In the embodiment of FIG. 3, scan regions 32 a and 32 b are identifiedon the same surface of the flexure 40 (i.e. the bottom surface 48 ofarms 30 to induce a positive pitch deflection), and are identified at aposition on each of the spring arms 30 that is approximately the samedistance from the distal end of flexure 40. That is, scan regions 32 aand 32 b are sized to be substantially of equal length as measuredlongitudinally, and are substantially aligned with each other along atransverse axis of the flexure. By identifying scan regions 32 a and 32b in this manner (i.e. aligned and on the same surface of flexure 40) abias that is comprised primarily of only a pitch deflection can beobtained. The scan regions 32 a and 32 b could be identified atdifferent locations along the length of each spring arm 30, they can besized differently or they can be identified on different surfaces offlexure 40 to produce a bias comprised of both pitch and rollcomponents. Scanning the same surface of both spring arms 30 with lines34 that are parallel to the pitch axis 15 as opposed to scanning linesthat are angled from pitch axis 15 also helps induce a deflection in theflexure 40 that is primarily comprised of a pitch correction. However,lines 34 could be angled relative to axis 15 to produce both a pitch androll bias.

FIG. 4 shows an embodiment of a flexure wherein both a pitch and a rollbias are induced in a flexure 140 to account for pitch and roll staticattitude errors in accordance with the present invention. Morespecifically, a distal portion of flexure 140 that is attached to a headsuspension in the manner described above is shown. Scan regions 132 aand 132 b are identified on a bottom surface 148 of flexure 140 near thedistal ends of spring arms 130 of flexure 140. In the manner describedabove in connection with FIG. 3, a plurality of lines 134 can be scannedin regions 132 a and 132 b to induce a positive pitch bias in theflexure 140, and thus overcome negative pitch errors in static attitude.Additional scan regions 132 c and 132 d are identified on cross piece128 of flexure 140. Scan region 132 c is identified on top surface 146of flexure 140, while scan region 132 d is identified on bottom surface148 of flexure 140. Scan regions 132 c and 132 d are also scanned by alaser, e.g. scanning a plurality of parallel lines 135 in regions 132 cand 132 d, to induce a roll bias in the flexure 140. That is, aplurality of lines 135 that are parallel to the longitudinal axis 111 offlexure 140, that extend across the entire width of cross piece 128, andthat are spaced apart from each other in a desired manner are scanned inregion 132 c, while a similar plurality of lines 135 are scanned inregion 132 d. The lines 135 scanned in region 132 c will cause crosspiece 128 to warp in a direction toward the top surface 146, while thelines 135 scanned in region 132 d will cause the cross piece to warp ina direction toward bottom surface 148. In this manner, the flexure 140is twisted by the torsional forces exerted by these warped regions, anda roll bias is thus induced in the orientation of flexure 140. Theamount of roll bias induced in flexure 140 is tailored to account for adesired amount of roll error in the static attitude provided by the headsuspension to which the flexure 140 is attached.

In the embodiment of FIG. 4, scan regions 132 c and 132 d are spacedapart from longitudinal axis 111 by an approximately equal amount (i.e.scan regions 132 c and 132 d are symmetric with respect to centrallongitudinal axis 111), and the number of lines 135 scanned in eachregion 132 c and 132 d can be approximately equal to provide symmetrictorsional forces about longitudinal axis 111. The scan regions 132 c and132 d can alternatively be chosen to provide varying torsional effectsto the flexure 140 as desired by a specific application, such as bypositioning scan regions 132 c and 132 d at different positions relativeto axis 111 or by scanning a different number of lines 135 in regions132 c and 132 d to impart a greater or lesser amount of total warpcaused by lines 135, and thus tailor the amount of roll bias induced asdesired by a specific application. That is, scan region 132 c could bescanned with a greater number of scan lines 135 than are scanned inregion 132 d to control the torsional effect of the scanning process.This could include scanning no lines 135 in either scan region 132 c or132 d if desired.

As with the pitch bias introduced by the scanning of regions 132 a and132 b, regions 132 c and 132 d can be selected to induce either apositive or a negative roll bias into the static attitude of flexure140. In the embodiment shown in FIG. 4 wherein region 132 c isidentified in top surface 146 to the left of axis 111 (as vieweddistally along axis 111) and scan region 132 d is identified in bottomsurface 148 to the right of axis 111, a negative roll bias is inducedabout axis 111, consistent with the right hand rule (i.e. the warpcaused by the scan lines 135 applied to regions 132 c and 132 d twiststhe flexure in a direction that is counterclockwise as viewed distallyalong the longitudinal axis 111). Scanning the opposite surfaces ofcross piece 128 (i.e. defining region 132 c on the bottom surface 148 tothe right of axis 111 and region 132 d on top surface 146 to the top ofaxis 111) would induce a positive roll bias.

FIG. 5 shows another embodiment of a portion of a flexure 240 processedin accordance with the present invention to affect the static attitudeof a head suspension to which flexure 240 is attached. A pair of scanregions 232 a and 232 b are defined on the spring arms 230 of theflexure 240. Specifically, scan region 232 a is defined in a bottomsurface 248 of spring arm 230 a, while scan region 232 b is defined in atop surface 246 of spring arm 230 b. A plurality of lines 234 arescanned in each of the scan regions 232 a and 232 b. Scan region 232 awill warp in a downward direction toward bottom surface 248, while scanregion 232 b will warp in an upward direction toward top surface 246. Bydefining scan regions 232 a and 232 b in opposing surfaces of the springarms 230, a roll bias can be induced due to the differing directions ofthe warp induced by the scanning of the plurality of lines 234.Moreover, depending on the number of lines 234 scanned in each of thescan regions, the amount of warp experienced by the regions 232 a and232 b can either be the same, resulting in a net pitch bias that isapproximately zero, or it can be different in order to impart a netpitch bias in either the positive or negative direction as may bedesired.

For simplicity, the flexures 40, 140, and 240 of FIGS. 3-5 are shownwithout a conductive trace assembly routed over the respective flexures.In actual use, conductive leads, such as a conductive trace assembly, aflexible circuit, or conductive wires, are provided to enable thereading and/or writing of data by a head slider attached to the flexure.In one preferred embodiment, a conductive trace assembly is routed alongthe suspension component processed in the manner described above so thatthe conductive trace does not cross scan regions that are located in thehead suspension component. It has bee n found that locating scan regionsover which a conductive trace assembly is routed may reduce the amountof deflection achieved. This is because the conductive layer of materialmay block part of the laser energy. In addition, since the conductiveand insulating layers of material are not being micro-warped, theyresist the warping of the underlying head suspension component. FIG. 19thus illustrates a preferred configuration for a flexure 40′ and aconductive trace assembly 50′ wherein trace assembly 50′ is routed alongthe spring arms 30′ of flexure 40′ until it approaches the distalportion of the flexure. Near the distal portion of flexure 40′ the traceassembly 50′ is routed off of the surface of spring arms 30′ and extendsadjacent to the spring arms 30′ . Scan regions 32 a′ and 32 b′ arelocated on the spring arms 30′ at a location wherein the trace 50′extends parallel and adjacent to the arms 30′, and thus trace assembly50′ is not scanned during the static attitude adjustment processdescribed herein.

It is contemplated that other configurations for the conductive traceassembly can be used in accordance with the principles of the presentinvention, and FIGS. 20 and 21 illustrate such alternative embodiments.In FIG. 20, a trace assembly 50″ extends along the length of spring arms30″ of flexure 40″, and the scan regions 32 a″ and 32 b″ are defined ina manner that the trace assembly 50″ is scanned along with the springarms 30″. Trace assembly 50″ is routed distally of cross-piece 28″, andscan regions 32 c″ and 32 d″ can be located so that trace assembly 50″is not scanned by the laser. FIG. 21 shows a third embodiment of aflexure 40′″ wherein the conductive trace 50′″ extends adjacent to arms30′″ and beyond cross-piece 28′″ of flexure 40′″.

While FIGS. 3-5 show a plurality of adjacent paths (i.e. a plurality oflines) scanned in the desired scan regions, these regions can be scannedwith one or more paths having any number of different shapes to producea desired warp in the head suspension. For example, with sufficientanalysis, a non-linear pattern of scan lines could be scanned tocompensate for pitch and/or roll errors in a simultaneous fashion. Inaddition, rather than scanning individual lines in the specified scanregions, the laser could traverse and scan a continuous pattern thattraces a desired configuration along the length of a scan region tocreate a desired warp (and thus a pitch and/or roll bias) in the scanregion.

Moreover, while FIGS. 3-5 show a flexure that is part of a three piecehead suspension design, the static attitude of a two piece headsuspension having an integral flexure can be adjusted in a mannersimilar to that described above. FIG. 22 illustrates a portion of a headsuspension 410 having an integral flexure 440. Flexure 440 includes afirst set of torsion arms 430 and a second set of torsion arms 431.First set of torsion arms 430 is comprised of arms 430 a and 430 b, andare interconnected between an outer frame 418 and inner spring alms 436.Second set of torsion arms 431 is comprised of arms 431 a and 431 b, andare interconnected between the inner spring arms 436 and a slidermounting platform 438. The first set of torsion arms 430, the second setof torsion arms 431, and the inner spring arms 436 are sufficientlyresilient to permit the slider mounting platform 438 (and a head sliderattached thereto) to gimbal in response to fluctuations in the airbearing as the suspension 410 and slider fly over a rotating disk in adisk drive.

Because of the configuration of flexure 440, a static attitudeadjustment is preferably accomplished by torsionally rotating the firstand second set of torsion arms 430 and 431, respectively, in a desiredmanner to cause a pitch and roll bias in the static attitude of mountingplatform 438 of suspension 410. As illustrated in FIG. 22, then, scanregions 432 a and 432 b can be located in a bottom surface 448 on thelongitudinal portion of inner spring arms 436. A plurality of lines 434can be scanned in scan regions 432 a and 432 b with a laser beam to warpthe regions 432 a and 432 b in a desired manner. As shown in FIG. 22,scanning a plurality of lines 434 in scan regions 432 a and 432 b willcause the torsion arms 431 to twist, which will impart a pitch bias tothe slider mounting region 438. The direction of the pitch bias (i.e.positive or negative) can be altered by defining regions 432 a and 432 bin the respective opposite surfaces of the flexure 440 or by locatingscan regions 432 a and 432 b either proximally or distally of torsionarms 431.

Scan regions 432 c and 432 d can be identified in the transverse portionof inner spring arms 436 to effect a roll bias in the static attitude ofhead suspension 410 in a similar manner. Region 432 c and region 432 dare located on bottom surface 448 of spring arms 436, and a plurality oflines 435 are scanned in these regions to warp the regions, and thusinduce a roll bias through torsion arms 430 in the static attitude ofhead suspension 410. The direction of the roll bias can be controlled bylocating the scan regions on the appropriate surface (i.e. top orbottom) or on the appropriate portion of spring arms 436 (i.e. proximalor distal of torsion arms 431). Scan regions can also be identified inother portions of flexure 440, such as in one or both sets of torsionarms 430 and 431 to effect pitch and/or roll static attitude correctionsas desired.

The amount of scanning performed on the one or more regions of a headsuspension, and thus the amount of warp that is induced, is dependentupon a number of variables, each of which can be controlled as needed bya desired application to optimize the scanning process. One constrainton the amount of scanning performed on a head suspension in a staticattitude compensation process is the amount of pitch and/or rollcorrection that is needed to overcome pitch and roll errors in thestatic attitude of the head suspension. A second constraint on theamount of scanning performed may be that the head suspension not bepermanently marked during the correction process, which will diminishthe aesthetic appearance of the part. In the embodiments of FIGS. 3-5,the head suspension is scanned with a plurality of lines using a laserbeam having a predetermined size and intensity. Moreover, the pluralityof scan lines are spaced apart to control the amount of localized heatapplied to the head suspension at each of the individual lines, and therate at which the laser traverses the head suspension in scanning thescan regions is controlled in a desired manner to control the amount ofheat applied to the head suspension. In other words, the amount ofscanning performed on a head suspension will vary with the size andintensity of the laser beam, the spacing between the lines scanned bythe laser beam, the number of lines scanned by the laser, and the rateat which the lines are scanned. The physical configuration of the headsuspension (i.e. part width and thickness) will also play a part in theamount of angular deflection the head suspension experiences for a givenamount of scanning. For a specific suspension configuration, then, beamsize, intensity, number of scan lines, and scan rate can be optimized asnecessary to induce the proper amount of pitch and/or roll correctionwhile not permanently marking the head suspension part.

The amount of scanning that needs to be performed on a head suspensionto effect a desired deflection can be experimentally obtained and storedfor later reference by holding certain of the variables described abovethat affect the heat imparted to the component constant while varyingother variables. For example, using the flexure of FIG. 3 to illustratewherein a plurality of lines 34 are scanned in the head suspension, thebeam size and beam intensity of the laser used to scan lines 34, thespacing between individual lines 34, and the rate at which the headsuspension is scanned can all be held constant, while the number oflines 34 that are scanned, and thus the size of scan regions 32 a and 32b, is varied to experimentally determine the deflection obtained from agiven number of lines that are scanned in a specific region of flexure40. The resulting angular deflection is then measured and a responsecurve depicting deflection as a function of the number of scan lines fora scan region on a bottom surface 48 of a spring arm 30 for a givenlaser beam size, intensity, and scan rate can be obtained. Similarresponse curves for a scan region on a top surface 46 of a spring arm 30and for scan regions on the top and bottom surfaces of cross piece 28 offlexure 40 can be obtained for a given laser beam size, intensity, andscan rate.

FIGS. 7, 9, 11, 13, 15, and 17 illustrate the results of such aninvestigation wherein different portions and surfaces of a specific headsuspension configuration were scanned with a varying number of lineswhile other variables that affect the heat imparted to the scan regionswere held constant to determine the pitch and roll deflection thatresult at each specific scan region. For each of the plots shown inFIGS. 7, 9, 11, 13, 15 and 17, laser beam power, the scan speed of thelaser as it traverses the head suspension, the diameter of the laserbeam, the wavelength of the laser, and the spacing between the adjacentscan lines were held constant while different scan regions of a flexurewere scanned with a varying number of scan lines. In the embodimentsshown in FIGS. 3-5, the power of the laser beam was either 6.2 watts(for scans made in the bottom surface of the head suspension) or 7.2watts (for scans made in the top surface of the head suspension), andthe scan speed was 1.1 meters per second. The difference between thepower for the top and bottom lasers is due to differing optics attachedto the lasers, and identical power can be used for lasers provided withsimilar optics. The diameter of the laser beam was set at 35 micrometerswith a wavelength of 1100 nm. The spacing between individual scan lineswas set at 30 micrometers.

FIG. 7 shows the positive angular pitch deflection obtained as functionof the number of lines scanned in a pair of scan regions located in abottom surface of the spring arms of a head suspension flexure (forexample, scan regions 32 a or 32 b of flexure 40 of FIG. 3). The numberof scan lines represents the number of lines scanned in each of the scanregions, and the angular deflection is measured about a pitch axislocated at the head suspension load dimple. FIG. 9 shows the negativeangular pitch deflection as a function of the number of lines scanned inregions located in a top surface of the spring arms of a flexure. FIG.11 shows the positive angular roll deflection obtained as a function ofthe number of lines scanned in a cross piece of a flexure, with the scanregion located to the right of the longitudinal axis (as vieweddistally) and on the top surface of the flexure. FIG. 13 shows thenegative angular roll deflection obtained a function of the number oflines scanned in a cross piece of a flexure with the scan region locatedto the left of the longitudinal axis and on the top surface of theflexure. FIG. 15 shows the positive angular roll deflection as afunction of the number of lines scanned in a region located on a topsurface of a flexure spring arm. FIG. 17 shows the negative angular rolldeflection as a function of the number of lines scanned in a regionlocated on a bottom surface of a flexure spring arm. As shown in thesefigures, pitch corrections of up to 1.5° and roll corrections of up to1.2° are common. Pitch corrections of up to 2.5° and roll corrections ofup to 1.5° have been achieved.

Once the response curves shown in FIGS. 7, 9, 11, 13, 15, and 17 havebeen obtained for a particular flexure configuration and laser operatingconditions, the curves can be analyzed to determine a mathematicalequation for each of the response curves. The data of these Figures isprimarily linear, and thus a first order equation can be developed tocharacterize each of these response curves. The response curvesadvantageously allow a prediction/correction methodology to be followedduring the manufacture of a head suspension generally, and specificallyduring static attitude corrections. That is, the error in staticattitude of a head suspension can be measured, and the appropriatelocation of the scan region(s) can be determined based on the necessarycorrection (e.g. a bottom surface of a flexure spring arm to provide apositive pitch deflection). The response curves and correspondingequations can be used to determine the approximate number of lines to bescanned in the region(s) necessary to effect a desired angulardeflection. The scan region(s) are then scanned with the appropriatenumber of lines to approximately achieve the amount of pitch and/or rollcorrection that is needed.

Such a methodology is preferably used as part of a closed loop processto provide precise micro-warping of a head suspension component, such asthe flexures 40, 140, and 240 shown in FIGS. 3-5. Once a region of ahead suspension has been scanned with a laser, the region can be againscanned to cause additional deflection of the scan region if necessary.The scanning of a region that has been previously scanned will typicallyproduce an angular deflection from the second scanning process that isless than the angular deflection achieved from the time the region isscanned. The amount of scanning (e.g. the number of lines scanned) istypically lower for the second scanning process. This is because thesecond scan has to increase the amount of compressive plasticdeformation already induced in the irradiated material by the first scanoperation, and also to increase the amount of elastic stress in theopposite, non-irradiated surface.

Additional scanning of the identified region can be done (i.e. third andfourth scans) if desired, with each successive scanning operationproducing an incrementally smaller warping of the region than theimmediately preceding scanning operation. In this manner, increasinglyprecise static attitude adjustments can be made. It has been determined,however, that scanning an individual region twice is typicallysufficient to meet manufacturing requirements for static attitudeaccuracy. The first scanning of a region in a head suspension componentis referred to as a “coarse” static attitude adjustment, while thesecond scanning of the region is referred to as a “fine” static attitudeadjustment.

FIGS. 7, 9, 11, 13, 15, and 17 described above each illustrate either acoarse pitch static attitude adjustment or a coarse roll static attitudeadjustment for a head suspension. As with FIGS. 7, 9, 11, 13, 15, and 17described above, data describing the relationship between the amount ofscanning performed to a specific scan region a second time and theangular deflection that is achieved can be generated and stored forlater reference. That is, response curves for a particular headsuspension that illustrate the amount of angular deflection effectedduring a fine static attitude adjustment process can be experimentallyobtained as a function, for example, of the number of lines scanned byholding other variables that affect the amount of deflection obtainedconstant. Plots of the response curves for a fine static attitudeadjustment are shown in FIGS. 8, 10 ,12, 14, 16, and 18.

As with FIGS. 7, 9, 11, 13, 15, and 17, laser power, scan speed, laserbeam diameter, laser wavelength, and spacing between individual scanlines were held constant while the number of scan lines was changed toproduce the fine static attitude adjustment curves of FIGS. 8, 10, 12,14, 16, and 18. The values of the variables held constant in generatingthe plots of FIGS. 7, 9, 11, 13, 15, and 17 were held at the same valuesin generating the plots of FIGS. 8, 10, 12, 14, 16, and 18.

Once the coarse and fine static attitude adjustment data describing therelationship between angular deflection and the amount of scanningperformed have been obtained, an iterative, closed loop process foradjusting static attitude to provide precise pitch and/or rollcorrections can be performed. That is, an iterative process wherein atleast one region of a head suspension is scanned with a laser two timesto effect a total desired angular deflection of the scan region can beused to provide precise corrections to head suspension static attitude.A specific application of such an iterative process for correctingstatic attitude is schematically illustrated in FIG. 6 a. More to thepoint, FIG. 6 a is a schematic, block diagram of an iterative processwherein regions are scanned with a plurality of lines multiple times toprovide precise static attitude corrections. The coarse and fineadjustment response curves for pitch and roll static attitudecorrections as a function of the number of lines scanned in a specificscan region for a given head suspension configuration (shown in FIGS.7-18) are advantageously used in such a process to provide aprediction/correction/feedback/prediction/correction methodology forstatic attitude corrections.

In addition, the measuring equipment can be modified so that it operateswhen the laser beam is irradiating the part. This provides for a realtime continuous feedback operation that shows changes in pitch and rollstatic attitude as they are being effected. Because of the relativelyslow speed of current real time measuring apparatus, however,prediction/correction/feedback methodology provides an advantage inprocessing speed with comparable accuracy to real time measurementmethodology.

With specific reference to FIG. 6 a, a process 58 performed on a flexureof a head suspension will be described. At first step 60 in the process58 a head suspension having a flexure is placed in its loaded state on ameasurement apparatus to simulate the dynamic attitude a head sliderattached to the part would experience under normal operating conditions.Once in its loaded state, at step 61 the static attitude of the headsuspension can be measured with a probe, and the pitch and roll errorsbetween the measured static attitude and the desired static attitude aredetermined. In this regard, the static attitude of the head suspensioncan be measured using any of a number of known methods, such as with alaser measurement probe (shown in FIG. 23 and described in more detailbelow). Alternatively, when processing a large number of headsuspensions, the nominal static attitude of only the first few headsuspensions may be measured. If the static attitudes are sufficientlysimilar to each other, the static attitude of the remaining headsuspensions can be assumed to be that of the first few head suspensions,and this measurement step may not be performed. This is particularlytrue in view of the iterative correction process described furtherbelow.

A coarse static attitude adjustment is shown at steps 62 and 63 whereinthe number of scan lines necessary to effect a specific pitch and/orroll adjustment is determined using coarse adjustment response curvesand equations that have been previously determined for the headsuspension, and the desired number of scan lines are scanned in theappropriate scan regions. As part of step 62, the appropriate scanregions are determined based upon the magnitude and direction of therequired pitch and/or roll error. That is, to correct a negative pitcherror, scan regions are located on a bottom surface of the flexurespring arms to cause a positive pitch deflection through the scanning ofthe lines in the scan region(s). The number of scan regions can varybased upon the amount of pitch correction that is necessary.

Also, as part of the process of determining the number of lines to scanin a scan region, it is presently preferred to only correct a portion ofthe measured pitch and/or roll errors with a coarse static attitudeadjustment That is, rather than attempting to correct the entire pitchor roll static attitude error with a single scanning of lines, the totalpitch or roll error to be corrected is reduced by a specific amount. Forexample, when correcting pitch errors, the appropriate location for thescan region(s) are determined and the number of scan lines to be scannedin the scan region(s) is determined from the coarse pitch adjustmentplots and equations based on a desire to achieve a specific percentageof the entire pitch correction with the coarse static attitudeadjustment. The scan regions are then scanned with the laser bytraversing the scan region with a plurality of scan lines at step 63. Asimilar operation can be conducted for any roll error that must beaccounted for wherein the necessary roll correction, either positive ornegative, and the magnitude of the correction are first determined, theproper location for the scan region is determined, and the number oflines to correct a specific percentage of the total roll error isdetermined from the coarse adjustment plots for roll error. It ispresently preferred that the percentage of the pitch and/or roll errorsthat are corrected be greater than about eighty percent and less thanabout one hundred percent.

At step 64, the resulting static attitude of the head suspension isagain measured after the coarse pitch and roll corrections performed atsteps 62 and 63. If the measured static attitude differs from thenominal static attitude by more than a threshold valve, such as 0.05degrees for example, in either pitch or roll, then a fine staticattitude adjust is performed, as shown at steps 65 and 66. That is, thefine adjustment response curves and equations for the specific headsuspension part are referenced to determine the number of scan linesrequired to correct the remaining pitch and/or roll errors at step 65.The appropriate number of lines are then scanned in the previouslyidentified and scanned scan region(s) at step 66. The resulting staticattitude is again measured at step 67. Additional scan iterations can beperformed if desired in a similar manner, as is shown at step 68. It hasbeen found, however, that two iterations are typically sufficient tocorrect pitch and roll errors to within acceptable levels, and thus atwo iteration process is presently preferred.

As shown in FIG. 6 b, a response factor can be calculated and used toprovide a more accurate fine static attitude adjust if desired. As shownat step 164 a, after the coarse static attitude adjustment has been madeand the resulting static attitude measured, a response factor can becomputed by calculating the ratio of the estimated angular deflection tothe measured angular deflection. The number of scan lines necessary tocorrect the remaining pitch and/or roll errors in static attitude canthen be calculated at step 165, and the number of scan lines can bemultiplied by the response factor at step 165 a. If the part behaved asexpected during the coarse static attitude adjustment, then the responsefactor will be 1.0, and no change will be made to the number of fineadjust scan lines. If less angular deflection than predicted was seen inthe coarse static attitude adjust, then the response factor will begreater than 1.0 and the number fine adjust scan lines will be adjustedupward. If more response was seen during the coarse adjust, then theresponse factor will be less then 1.0, and the number of find adjustscan lines will accordingly be adjusted downward. The fine staticattitude adjust is then performed at step 166 by scanning the scanregions with the adjusted number of fine adjust scan lines.

Using such an iterative, closed-loop process, pitch and roll correctionsto within 0.01° of the desired static attitude have been achieved usingcoarse and fine adjustment response curves. A process that utilizes onlytwo scan iterations also advantageously provides for a more efficientmanufacturing process in that the cycle time for correcting staticattitude can be reduced as compared to processes with additional scaniterations.

It is to be understood that, while the iterative process of FIGS. 6 aand 6 b has been described with reference to correcting only a portionof the pitch and roll errors with the coarse static attitude adjuststep, the pitch and roll error correction goal of the coarse staticattitude adjust can be up to 100%. In addition, the goal of the coarsestatic attitude adjust step can be set at a specific angular deflection,and the number of scan lines calculated based on this set figure ifdesired.

In the examples described above, the amount of scanning necessary toeffect a desired angular deflection is described in terms of the numberof scans needed to accomplish the course and fine static attitudeadjustments for a given beam intensity, beam diameter, scan velocity,and scan line spacing. The relationship between the angular deflectionachieved and the amount of scanning performed can also be determined asa function of a different laser operating parameters. For example, thenumber of scan lines could be held constant while the laser beamintensity is varied to determine the relationship between deflection andbeam intensity. Both coarse and fine static attitude adjustments can bedetermined in this manner.

FIG. 23 shows an apparatus 70 useful for performing the measurement andscanning steps described herein, and specifically for performing theprocess shown in FIGS. 6 a and 6 b. Apparatus 70 is generally comprisedof a clamp 72, a probe 74, an upper laser 76 having a laser fiber 90, alower laser 78 having a lower laser fiber 92, an upper scan head 80 anda lower scan head 82. A head suspension is secured within clamp 72 andpositioned beneath probe 74. As is known, clamp 72 includes an apparatusthat places the head suspension 10 in a loaded state in order tosimulate the fly height and orientation provided by the head suspension.

The probe 74 measures the positional orientation provided by the headsuspension component. In a preferred embodiment, a WYKO probe, modelnumber 872-104 and available from Veeco Metrology Group of Tuscon,Ariz., can be used to measure the positional orientation provided by thehead suspension. The probe 74 is positioned above clamp 72 and the partheld within clamp 72, and fires one or more lasers at the headsuspension part supported in clamp 72 to measure the static provided bythe part, as is known in the industry. Pitch and roll errors in staticattitude can then be determined, such as with the use of amicroprocessor (not shown). Upper laser 76 and lower laser 78 are eachused to generate a laser beam of a desired intensity, and the intensityof lasers 76 and 78 can be controlled with the microprocessor, as isknown. A continuous wave fiber laser such as is available from SDL,Inc., of San Jose, Calif., model number SDL-F620-4211-001, is preferredfor lasers 76 and 78, and a focused spot size diameter of between 35 and40 micrometers have been found to be useful in the method of the presentinvention. Upper laser 76 is used to direct a laser beam through fiber90 and toward a top surface of the head suspension part supported inclamp 72 to scan one or more scan regions on the top surface of thepart. Lower laser 78 is used to direct a laser beam through fiber 92 andtoward a bottom surface of the part to scan one or more scan regions onthe bottom surface of the part.

The movement of the laser beams across the part is accomplished withupper and lower scan heads 80 and 82. The upper laser beam is directedtoward the upper scan head 80, while the lower laser beam is directedtoward the lower scan head 82. Upper and lower scan heads 80 and 82,respectively, are used to deflect the laser beam from the upper andlower laser 76 and 78 toward turning mirrors 84 and 86, which redirectthe laser energy toward the head suspension part held within clamp 72 toscan the desired pattern on the head suspension part. That is, theactual travel of the laser beam across a scan region of a headsuspension is controlled through movement of the appropriate scan head.Accordingly, upper and lower scan heads 80 and 82 each include mirrorsand objective lenses to deflect and focus the incoming laser beam towardthe head suspension part, and each mirror is coupled to a servo motor(not shown) to move the mirror in a desired fashion to scan the headsuspension part. The rate at which head suspension is scanned is alsocontrolled by the motion of the mirrors. In this regard, the function ofthe upper and lower scan heads 80 and 82 are preferably controlled bythe microprocessor attached to apparatus 70.

In the preferred embodiment shown in FIG. 3, the plurality of lines 34scanned in a pair of scan regions, such as regions 32 a and 32 b, can beachieved with the use of a “jump pattern” between the pair of scanregions 32 a and 32 b. That is, a first distal line can be scanned inscan region 32 a, the laser then “jumps” to the second scan region 32 band scans a first distal line in this region, the laser then jumps backto the first scan region 32 a to scan a second line in this region thatis proximal to the first scanned line. The laser is then redirected tothe second region 32 b to scan a second line distal of the first scannedline in region 32 b, and so on until the desired number of lines hasbeen scanned in each of the scan regions 32 a and 32 b. The proximalmovement of the laser beam in the jump pattern controls the spacingbetween the individual lines in the plurality of lines, and this too ispreferably controlled by the microprocessor of apparatus 70. In anembodiment such as that shown in FIG. 3 where the scan regions 32 a and32 b are both defined in bottom surface 48 of flexure 40, the lowerlaser 78 and lower scan head 82 are used to scan the plurality of lines34 in scan regions 32 a and 32 b. Where a scan region is identified in atop surface of a head suspension component, the upper laser 76 and upperscan head 80 are used to scan the desired pattern of lines in the upperregion.

Scan heads are known in the industry, and in the apparatus shown, scanheads that are commercially available from Scanlab AG in Germany wereused. A model HS7 1100 nm scan head from Scanlab has been found to beuseful for upper and lower scan heads 80 and 82 of apparatus 70.

Once the probe 74 has determined the static attitude provided by thesuspension, and the pitch and roll errors have been determined, theregions of the head suspension and the number of scan lines necessary tocorrect the pitch and/or roll static attitude errors can be determined,such as through the use of coarse and fine static attitude adjustresponse curves described above. In this regard, the microprocessor ofapparatus 70 is again preferably used. That is, the same microprocessorcan be used to operate the measuring probe 74, calculate the coarse andfine static attitude adjustments, the firing of the upper and lowerlasers 76 and 78 at a desired intensity, and to control the motion ofthe upper and lower scan heads 80 and 82 to scan the regions of the headsuspension a desired pattern at a desired speed.

Apparatus 70 performing the process 58 depicted in FIG. 6 aadvantageously corrects static attitude of a head suspension part towithin acceptable levels, and may also advantageously reduce the cycletime per head suspension over conventional static attitude correctionprocesses.

The method for adjusting the static attitude of head suspension byscanning the head suspension in the manner described above alsoadvantageously provides for very precise pitch and roll corrections,with corrections to at least 0.01° of the desired static attitudepossible. Pitch and roll corrections can be provided for independentlyof each other to provide great precision in these corrections.Alternatively, pitch and roll corrections can simultaneously be providedif desired.

The present invention also advantageously provides for a more efficientmanufacturing process as compared to conventional processes, with partyield being increased due to the great precision with which correctionscan be made, and with cycle time necessary to provide these correctionsbeing reduced.

Moreover, the scanning of a plurality of lines to cause micro-warping ofa head suspension component can be used to adjust other performancecharacteristics of a head suspension. As described above, the fly heightat which a head slider operates is dependent upon the gram load providedby a spring region in a suspension load beam. The spring region istypically pre-formed or radiused to control the gram load provided. Aplurality of lines can be scanned in the spring region of the load beamto change the gram load of the spring region. For example, to increasethe gram load, the spring region can be scanned on a surface thatincreases the amount of curvature of the spring region. To decrease thegram load, the opposite surface can be scanned to reduce the amount ofcurvature in the spring region.

Although the present invention has been described with preferredembodiments, workers skilled in the art will recognize may be made inform and detail without departing from the spirit the invention.

1. A method for adjusting static attitude of a head suspension,comprising the step of scanning at least one line continuously across atleast a predetermined region of the head suspension with a laser toimpart heat to the region to selectively adjust at least one of pitchand roll static attitude of the head suspension using an amount ofscanning necessary to compensate for at least one of a pitch error and aroll error based on stored data from a prior measurement of at least oneof the pitch and roll errors in a suspension of the type then beingscanned.
 2. The method of claim 1, wherein the step of scanning the headsuspension includes scanning a first scan region in a first spring armof a flexure of the head suspension.
 3. The method of claim 2, furtherincluding the step of scanning a second scan region of the headsuspension with the laser beam to impart heat energy to the second scanregion.
 4. The method of claim 3, wherein the scan region is located ina second spring arm of the head suspension flexure.
 5. The method ofclaim 4, wherein the step of scanning the first and second scan regionswith a laser beam includes scanning a plurality of lines in the firstand second scan regions.
 6. The method of claim 5, wherein each of theplurality of lines scanned in the first and second scan regions extendsubstantially across the width of the first and second spring arms,respectively, the plurality of lines being substantially parallel to atransverse axis of the head suspension, the scanning of the plurality oflines causing the spring arms to warp by an angular amount about thetransverse axis at the first and second scan regions.
 7. The method ofclaim 6, wherein the first scan region and the second scan region arelocated in a top surface of the flexure spring arms.
 8. The method ofclaim 6, wherein the first scan region and the second scan region arelocated in a bottom surface of the flexure spring arms.
 9. The method ofclaim 6, wherein the first scan region is located in a first surface ofthe flexure at the first spring arm, and wherein the second scan regionis located in a second surface of the flexure that is opposite the firstsurface of the flexure at the second spring arm.
 10. The method of claim1, wherein the step of scanning the head suspension includes scanning afirst scan region located in a cross piece at the distal end of a headsuspension flexure, the first scan region being adjacent and spacedapart in a first direction from a longitudinal axis of the headsuspension.
 11. The method of claim 10, further including the step ofscanning a second scan region located in the cross piece of the flexurewith the laser beam, the second scan region being adjacent and spacedapart in a second direction that is opposite the first direction fromthe longitudinal axis of the head suspension.
 12. The method of claim11, wherein the step of scanning the first and second scan regions withthe laser beam includes scanning a plurality of lines in the first andsecond scan regions.
 13. The method of claim 12, wherein each of theplurality of lines substantially extend across the width of the crosspiece, each of the plurality of lines being substantially parallel tothe longitudinal axis of the head suspension, the scanning of theplurality of lines causing the cross piece to warp by an angular amountabout the longitudinal axis at the first and second scan regions. 14.The method of claim 13, wherein the first scan region is located on afirst surface of the cross piece and the second scan region is locatedon a second surface that is opposite the first surface of the flexure.15. The method of claim 13, further including the steps of: scanning aplurality of lines in a third scan region of the head suspension, thethird scan region located in a first spring arm of the head suspensionflexure; and scanning a plurality of lines in a fourth scan region ofthe head suspension, the fourth scan region located in a second springarm of the head suspension flexure; wherein the plurality of linesscanned in the third and fourth scan regions are scanned substantiallyacross the width of the first and second spring arms, the plurality oflines scanned in the third and fourth scan regions being parallel to atransverse axis of the head suspension, the scanning of the plurality oflines in the third and fourth scan regions causing the third and fourthscan regions to warp by an angular amount about the transverse axis ofthe head suspension.
 16. The method of claim 1, wherein the step ofscanning the head suspension includes controllably scanning the headsuspension to effect a desired amount of static attitude correction. 17.The method of claim 16, wherein the step of controllably scanning thehead suspension includes determining the amount of scanning necessary toeffect a desired angular deflection from stored data describing therelationship between angular deflection and the amount of scanningperformed.
 18. The method of claim 17, wherein the relationship betweenthe angular deflection and the amount of scanning is determined as afunction of a number of scan lines scanned in the head suspension. 19.The method of claim 1 wherein the set of stored data is experimentallydetermined and stored for later reference as the amount of scanning thatneeds to be performed to effect a desired deflection.
 20. The method ofclaim 1 wherein when processing a large number of head suspensions, aset of stored data is experimentally determined for a first few headsuspensions, and stored for later reference as the amount of scanningthat needs to be performed for at least one of the pitch error and rollerror for the remaining head suspensions without requiring a measurementstep on the remaining head suspensions.
 21. A method for providing aprecise adjustment to the static attitude of a head suspension,comprising the steps of: determining an amount of scanning necessary tocompensate for at least a portion of one of a pitch error and a rollerror from a previously developed set of data for at least one of thepitch and roll errors; performing a coarse static attitude adjustment tothe head suspension, including a first step of scanning at least oneline continuously across at least a scan region of the head suspensionwith a laser beam to warp the scan region; measuring the static attitudeof the head suspension after the coarse static attitude adjustment; andperforming a fine static attitude adjustment to the head suspension,including a second step of scanning at least one line continuouslyacross at least the scan region of the head suspension a second timewith the laser beam, fine static attitude adjustment causing the scanregion to warp an additional amount that is less than the amount of warpcaused by the coarse static attitude adjustment.
 22. The method of claim21, wherein the first step of scanning comprises scanning a firstplurality of scan lines in the scan region, and the second step ofscanning comprises scanning a second plurality of scan lines in the scanregion.
 23. The method of claim 22, wherein the step of predicting theamount of scanning necessary includes predicting a number of scan linesto compensate for at least a portion of at least one of the pitch androll errors and further includes: determining the pitch error between adesired pitch static attitude and the measured pitch static attitude ofthe head suspension; determining the roll error between the desired rollstatic attitude and the measured roll static attitude of the headsuspension; determining the location of at least one scan region on thehead suspension to compensate for at least a portion of at least one ofthe pitch error and roll errors.
 24. The method of claim 23, wherein thestep of predicting the number of scan lines necessary to compensate forat least a portion of at least one of the pitch error and the rollerrors comprises calculating the number of scan lines from at least oneset of stored data depicting coarse static attitude adjustment as afunction of the number of scan lines for the at least one of the pitcherror and the roll errors.
 25. The method of claim 24, wherein theportion of the one of the pitch and roll errors comprises greater thanabout eighty percent of the total one of the pitch and roll errorbetween the desired static attitude and the measured static attitude.26. The method of claim 25, wherein the step of performing the coarsestatic attitude adjustment further includes predicting the number ofscan lines necessary to compensate for a portion of the other of thepitch error and the roll error.
 27. The method of claim 26, wherein thestep of predicting the number of scan lines necessary to compensate fora portion of the other one of the pitch error and the roll errorcomprises calculating the number of scan lines from at least oneresponse curve depicting coarse static attitude adjustment as a functionof the number of scan lines for the other one of the pitch error and theroll error.
 28. The method of claim 27, wherein the portion of the otherof the pitch error and the roll error comprises greater than abouteighty percent of the total other of the pitch error and the roll errorbetween the desired static attitude and the measured static attitude.29. The method of claim 22, wherein the step of performing a fine staticattitude adjustment further includes the steps of: determining the pitcherror between a desired pitch static attitude and the measured pitchstatic attitude provided by the head suspension after the coarse staticattitude adjustment; determining the roll error between a desired rollstatic attitude and the measured roll static attitude provided by thehead suspension after the coarse static attitude adjustment; andpredicting the number of the second plurality of scan lines necessary tocompensate for one of the pitch error and the roll error.
 30. The methodof claim 29, wherein the step of predicting the amount of scanningnecessary to compensate for one of the pitch error and the roll errorcomprises calculating the number of the second plurality of scan linesfrom at least one response curve depicting fine static attitudeadjustment as a function of the number of scan lines for the one of thepitch error and the roll error.
 31. The method of claim 30, wherein thestep of performing the fine static attitude adjustment further includespredicting the number of scan lines necessary to compensate for theother of the pitch error and roll error.
 32. The method of claim 31,wherein the step of predicting the number of scan lines necessary tocompensate for the other of the pitch error and the roll error comprisescalculating the number of scan lines from at least one response curvedepicting fine static attitude adjustment as a function of the number ofscan lines for the other of the pitch error and the roll error.
 33. Themethod of claim 22, wherein: the step of performing a coarse staticattitude adjustment further includes the steps of: determining the pitcherror between a desired pitch static attitude and the measured pitchstatic attitude of the head suspension, determining the roll errorbetween the desired roll static attitude and the measured roll staticattitude of the head suspension, determining the location of at leastone scan region on the head suspension to compensate for one of thepitch error and roll error, and predicting the number the firstplurality of scan lines necessary to compensate for a portion of the oneof the pitch error and roll error; and the step of performing a finestatic attitude adjustment further includes the steps of: determiningthe pitch error between a desired pitch static attitude and the measuredpitch static attitude provided by the head suspension after the coarsestatic attitude adjustment; determining the roll error between a desiredroll static attitude and the measured roll static attitude provided bythe head suspension after the coarse static attitude adjustment; andpredicting a number of scan lines for the second plurality of scan linesnecessary to compensate for one of the pitch error and the roll error.34. The method of claim 33, further including the steps of: calculatinga response factor prior to performing the fine static attitude adjust,the response factor comprising a ratio between the estimated angulardeflection for the coarse static attitude adjustment and the measuredangular deflection for the coarse static attitude adjustment; andadjusting the number of scan lines for the fine static attitudeadjustment consistent with the response factor.
 35. A method forprecisely micro-warping a region of metal to adjust static attitude of adisk drive head suspension, including the steps of predicting an amountof scanning necessary to compensate for at least one static attitudeerror from a set of stored data based on a prior measurement of at leastone static attitude error; and controllably scanning a laser beamcontinuously along at least one line across the metal region to bend themetal region by an amount which causes the suspension to have a desiredstatic attitude.
 36. The method of claim 35 wherein: the method includesmeasuring static attitude of the suspension; and controllably scanningthe laser beam includes scanning the laser beam across the metal regionuntil the measured static attitude corresponds to the desired staticattitude of the suspension.
 37. The method of claim 36 wherein: themethod further includes: providing scan number/static attitude changeinformation describing a relationship between number of scans and staticattitude changes; and determining the number of scans which will causethe suspension to have the desired static attitude as a function of themeasurement and the scan number/static attitude change information; andcontrollably scanning the laser beam includes scanning the laser beamacross the metal region the determined number of times.
 38. The methodof claim 35 wherein controllably scanning the laser beam includescontrolling the number of scans.
 39. The method of claim 38 whereincontrollably scanning the laser beam includes controlling the locationof the scans.
 40. The method of claim 35 wherein controllably scanningthe laser beam includes controlling the location of the scans.
 41. Themethod of claim 40 wherein controlling the location of the scansincludes controlling a surface of the metal region which is scanned. 42.The method of claim 35 for micro-warping a radius spring region of asuspension.
 43. The method of claim 35 for micro-warping flexure springarms of a suspension.
 44. The method of claim 35 wherein the set ofstored data is experimentally determined and stored for later referenceas the amount of scanning that needs to be performed to bend the metalregion by an amount which causes the suspension to have the desiredstatic attitude.
 45. The method of claim 35 wherein when processing alarge number of head suspensions, the set of stored data isexperimentally determined for a first few head suspensions, and storedfor later reference as the amount of scanning that needs to be performedto bend the metal region by an amount which causes the suspension tohave the desired static attitude for the remaining head suspensionswithout requiring a measurement step on the remaining head suspensions.